Thin film process |
TCO |
Metal |
Absorber |
---|---|---|---|
α-Si |
AZO target
GZO target
ITO target
|
Ag for reflective and conductive layer. NiV for protective layer. Ti for protective layer. |
─ |
CIGS |
AZO target
ZnO target
|
Mo for conductive layer. |
Cu-Ga target
Cu-In-Ga target
|